1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[A-4-2]The Role of Hydrogen during Rapid Vapor-Phase Doping Analyzed by FTIR-ATR
Yukihiro KIYOTA, Seiji SUZUKI, Taroh INADA(1.Central Research Laboratory, Hitachi Ltd., 2.College of Engineering, Hosei University)
