1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[A-5-3]Advanced Ti Salicide Technology for High Performance Quarter-Micron Logic LSIs
Jun Suenaga, Hirofumi Sumi, Kazuhiro Tajima, Atsushi Horiuchi, Michihiro Kanno, Yutaka Okamoto(1.MOS Process dept., MOS LSI div., Semiconductor Company, Sony Corporation)
