1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan

[A-5-4]Reconditioning-Free Polish for Inter-Layer-Dielectric Planarization

K. Nakamura, S. Kishii, Y. Arimoto(1.Fujitsu Laboratories Ltd.)
https://doi.org/10.7567/SSDM.1996.A-5-4
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