1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan

[A-5-5]Reliability of Low-Parasitic-Capacitance Multilevel Interconnection Using Surface-Densified Low-ε Organic Spin-on Glass

Takeshi FURUSAWA, Yoshio HOMMA(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1996.A-5-5
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