1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[B-1-1]Lithographic Technologies for 1-Gb DRAMs and Beyond
Shinji Okazaki(1.Semiconductor Development Center Semiconductor & Integrated Circuits Div. Hitachi Ltd.)
