1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[B-1-2]Effects of Cleavage on Local Cross-Sectional Stress Distribution in Trench Isolation Structure
Atsushi YAGISHITA, Tomohiro SAITO, Satoshi MATSUDA, Yukihiro USHIKU(1.Microelectronics Engineering Laboratories, Toshiba Corporation)
