1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[B-1-5]CMP with Pad-Press Ring for Superior Uniformity Performance
Mikio Nishio, Tomoyasu Murakami, Masashi Hamanaka(1.Semiconductor Research Center, Matsushita Electric Industrial, Co., Ltd., 2.Kyoto Research Laboratory, Matsushita Electronics Corporation)
