1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan

[B-1-6]Polysilicon Encapsulated LOCOS for Deep Submicron CMOS Lateral Isolation

Goncal Badenes, Rita Rooyackers, Ingrid De Wolf, Ludo Deferm(1.IMEC)
https://doi.org/10.7567/SSDM.1996.B-1-6
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