1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[B-2-1]Selective Nucleation Based Epitaxy(SENTAXY): A Novel Approach for Thin Film Formation
Hideya KUMOMI, Takao YONEHARA(1.Canon Inc., Device Development Center)
