1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[B-2-2]Deposition and Characterization of Silicon-Germanium Alloy Thin Films on Oxide
Rafael Reif(1.Microsystems Technology Laboratories Massachusetts Institute of Technology)
