1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[D-1-2]Highly Selective Wet-Etching Using Adipic Acid for Uniform Damage-Free Process of InAlAs/InGaAs HEMTs
Katsuhiko HIGUCHI, Hiroyuki UCHIYAMA, Takashi SHIOTA, Makoto KUDO, Tomoyoshi MISHIMA(1.Central Research Lab., Hitachi, Ltd.)
