1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
[A-2-3]Phosphorous Incorporation in Ultrathin Gate Oxides and Its Impact to the Network Structure
Kohichi Morino, Seiichi Miyazaki, Masataka Hirose(1.Department of Electrical Engineering, Hiroshima University)
