1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
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International Conference on Solid State Devices and Materials
1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan

[A-2-5]Scaling of Flash Memory Interpoly Dielectrics Using NH3-Annealed CVD SiO2 Single-Layer Films

T. Kobayashi, A. Katayama, H. Kume, K. Kimura(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1997.A-2-5
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