1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
[B-1-3]An Optimized Via Contact Scheme of FeRAM for Double-Level Metallization and Beyond
Yoo-Sang Hwang, Jin-Woo Lee, Sung-Yung Lee, Bon-Jae Koo, Dong-Jin Jung, Yoon-Soo Chun, Mi-Hyang Lee, Dong-Won Shin, Soo-Ho Shin, Sang-Eun Lee, Byung-Hee Kim, Nam-Soo Kang, Ki-Nam Kim(1.Technology Development, Semiconductor R&D Center, Samsung Electronics Co.)
