1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
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International Conference on Solid State Devices and Materials
1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan

[B-1-5]The Effect of Capacitor Electrode Contaminant on High Density DRAM's Device Characteristics

Y. Kawai, E. Uchida, M. Itoh, M. Yoshimaru, J. Ida(1.Oki Electric Industry Co., Ltd. VLSI R&D Center)
https://doi.org/10.7567/SSDM.1997.B-1-5
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