1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
[B-2-1]Properties of Highly Oriented Ta2O5 on Metal Electrodes
Koichi Kishiro, Nobuhiko Inoue, Shih-Chang Chen, Masaki Yoshimaru(1.VLSI R&D Center, Oki Electric Industry Co., Ltd.)
