1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
[B-2-2]Deposition of Epitaxial Yittria-Stabilized Zirconia (YSZ) on Si(100) and Simultaneous Growth of Amorphous SiO2 Interlayer
Tomonobu HATA, Yutaka MASUDA, Shin'ichi NAKANO, Kimihiro SASAKI, Yohko HANEDA, Kiyotaka WASA(1.Department of Electrical and Computer Engineering, Kanazawa University, 2.RITE)
