1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
[B-2-4]Propose of New Mixture Target for Low Temperature and High Rate Deposition of PZT Thin Films by Reactive Sputtering
Tomonobu HATA, WeiXiao ZHANG, Shinya KAWAGOE, Kimihiro SASAKI(1.Department of Electrical and Computer Engineering, Kanazawa University)
