1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
1997 International Conference on Solid State Devices and Materials
Sep 16 - Sep 19, 1997ACT CITY Hamamatsu, Hamamatsu, Japan
[D-2-3]Atomic Force Microscope Study of Two-Dimensional Dopant Delineation by Selective Chemical Etching
Kwang-Ki Choi, Tae-Yeon Seong, Dong-Ho Lee, Yong Sun Shon, Chung Tae Kim(1.Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST), 2.Memory R&D Division, Hyundai Electronics Co., Ltd.)
