1998 International Conference on Solid State Devices and Materials
Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
1998 International Conference on Solid State Devices and Materials
Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
[A-1-3]Sticking Configuration of Boron Atoms from B2H6 on Silicon during Rapid Vapor-Phase Doping
Yukihiro Kiyota, Hideaki Tanaka, Taroh Inada(1.Central Research Laboratory, Hitachi, 2.College of Engineering, Hosei University)
