1998 International Conference on Solid State Devices and Materials

1998 International Conference on Solid State Devices and Materials

Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
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International Conference on Solid State Devices and Materials
1998 International Conference on Solid State Devices and Materials

1998 International Conference on Solid State Devices and Materials

Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan

[A-2-4]New PentaCoordinated Si(PCS) Model for SiN CVD Mechanism

Shigehiko Saida, Yoshitaka Tsunashima(1.Microelectronics Engineering Laboratory, TOSHIBA Corp.)
https://doi.org/10.7567/SSDM.1998.A-2-4
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