1998 International Conference on Solid State Devices and Materials
Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
1998 International Conference on Solid State Devices and Materials
Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
[B-2-2]Chemica Vapor Deposition of Ru and Its Application in (Ba, Sr)TiO3 Capacitors for Future DRAM
Tomonori Aoyama, Masahiro Kiyotoshi, Soichi Yamazaki, Kazuhiro Eguchi(1.Microelectronics Engineering Laboratory, Toshiba Corporation)
