1998 International Conference on Solid State Devices and Materials
Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
1998 International Conference on Solid State Devices and Materials
Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
[B-2-5]Conformal Step Coverage of (Ba, Sr)TiO3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)2(DPM)2
Takaaki Kawahara, Shigeru Matsuno, Mikio Yamamuka, Masayoshi Tarutani, Takehiko Sato, Tsuyoshi Horikawa, Fusaoki Uchikawa, Kouichi Ono(1.Advance Technology R & D Center, Mitsubishi Electric Corporation)
