1998 International Conference on Solid State Devices and Materials

1998 International Conference on Solid State Devices and Materials

Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
International Conference on Solid State Devices and Materials
1998 International Conference on Solid State Devices and Materials

1998 International Conference on Solid State Devices and Materials

Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan

[C-2-3]STM Nano-Lithography with SiO2 Mask

Nan Li, Tatsuo Yoshinobu, Hiroshi Iwasaki(1.The Institute of Scientific and Industrial Research, Osaka University)
https://doi.org/10.7567/SSDM.1998.C-2-3