1998 International Conference on Solid State Devices and Materials

1998 International Conference on Solid State Devices and Materials

Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan
Back
International Conference on Solid State Devices and Materials
1998 International Conference on Solid State Devices and Materials

1998 International Conference on Solid State Devices and Materials

Sep 7 - Sep 10, 1998International Conference Center Hiroshima, Hiroshima, Japan

[LA-2]A Novel Shallow Trench Isolation with Mini-Spacer Technology

W. K. Yeh, Tony Lin, Coming Chen, S. W. Sun(1.United Microelectronics Corp., Technology Development Division)
https://doi.org/10.7567/SSDM.1998.LA-2
Download PDFDownload PDF
Back