1999 International Conference on Solid State Devices and Materials

1999 International Conference on Solid State Devices and Materials

Sep 21 - Sep 24, 1999Nihon Toshi Center Kaikan, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1999 International Conference on Solid State Devices and Materials

1999 International Conference on Solid State Devices and Materials

Sep 21 - Sep 24, 1999Nihon Toshi Center Kaikan, Tokyo, Japan

[B-1-4]The Impact of Nitrogen Implantation at LDD(NIL) on Deep Sub-Micron CMOS Devices

Sung-Kwon Hong, Sang-Gi Lee, Jae-Gyung Ahn, Dae-Gwan Kang, Jeong-Mo Hwang(1.LG Semicon Co., Ltd, R&D Division)
https://doi.org/10.7567/SSDM.1999.B-1-4
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