1999 International Conference on Solid State Devices and Materials

1999 International Conference on Solid State Devices and Materials

Sep 21 - Sep 24, 1999Nihon Toshi Center Kaikan, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1999 International Conference on Solid State Devices and Materials

1999 International Conference on Solid State Devices and Materials

Sep 21 - Sep 24, 1999Nihon Toshi Center Kaikan, Tokyo, Japan

[D-1-4]Sub-μm Silicon SETs on Self-Undulated Hyper-Thin SOI Films

K. Uchida, J. Koga, R. Ohba, S. Takagi, A. Toriumi(1.Advanced LSI Technology Laboratory, Toshiba Corporation)
https://doi.org/10.7567/SSDM.1999.D-1-4
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