1999 International Conference on Solid State Devices and Materials
Sep 21 - Sep 24, 1999Nihon Toshi Center Kaikan, Tokyo, Japan
1999 International Conference on Solid State Devices and Materials
Sep 21 - Sep 24, 1999Nihon Toshi Center Kaikan, Tokyo, Japan
[D-2-1]Single Electron Memory Devices Based on Silicon Nanocrystals Fabricated by Very High Frequency Plasma Deposition
Amit Dutta, Yoshinori Hayafune, Shigeo Hatatani, Shunri Oda(1.Research Center for Quantum Effect Electronics, Tokyo Institute of Technology)
