2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
[A-1-3]Indium Profile Control for Super Steep Retrograde (SSR) Well
T. Matsuda, A. Mineji, N. Nishio, H. Kitajima(1.ULSI Device Development Division, NEC Electron Devices, NEC Corporation)
