2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
[A-2-5]Dielectric Breakdown and Light Emission in Copper Damascene Structure under Bias-Temperature Stress
Ken-ichi Takeda, Kenji Hinode, Junji Noguchi, Hizuru Yamaguchi(1.Central Research Laboratory, Hitachi LTD., 2.Device Development Center, Hitachi LTD.)
