2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
[B-1-2]Quantitative Understanding of Electron Mobility Limited by Coulomb Scattering in MOSFETs with N2O and NO Oxynitrides
Takamitsu Ishihara, Shin-ichi Takagi, Masaki Kondo(1.Advanced LSI Thechnology Laboratory, Research and Development center, Toshiba corporation, 2.Semiconductor company, System LSI Division, Toshiba corporation)
