2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
[B-1-3]The Impact for Gate Oxide Scaling (32A-12A) and Power Supply for Sub-0.1 μm CMOSFETs
W. K. Yeh, C. Y. Lin, S. M. Cheng, C. T. Huang, H. H. Shih, J. K. Chen, F. T. Liou(1.United Microelectronics Corp., Logic Technology Department, Technology & Process Development Division)
