2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
[B-1-6]70nm NMOSFET Fabrication with 12nm n+-p Junctions Using As2+A Low Energy Ion Implantations
Byung Yong Choi, Suk Kang Sung, Byung Gook Park, Jong Duk Lee(1.Inter-university Semiconductor Research Center, School of Electrical Engineering, Seoul National University)
