2000 International Conference on Solid State Devices and Materials
Aug 29 - Aug 31, 2000Sendai International Center, Sendai, Japan
[B-2-1]20nm MOS Devices for the Birth of the 21st Century
Simon Deleonibus, Guillaume Bertrand, Georges Guegan, Michel Heitzmann, Pierre Mur, David Souil, Serge Tedesco(1.LETI (CEA-GRENOBLE) Departement de Microelectronique)