2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan

[A-1-1]Recent Progress in High-k Dielectric Films for ULSIs

Sang In Lee(1.Semiconductor R&D Division, Samsung Electronics Co., Ltd.)
https://doi.org/10.7567/SSDM.2001.A-1-1
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