2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan

[A-1-2]Periodic Mesoporous Silicate Glass as Low-k Thin Film

Yoshiaki Oku, Akira Kamisawa, Norikazu Nishiyama, Korekazu Ueyama(1.Process Technology Div., Semiconductor Research and Development Headquarters, ROHM CO., Ltd., 2.Osaka University, Graduate School of Engineering Science)
https://doi.org/10.7567/SSDM.2001.A-1-2
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