2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
[A-1-4]Dishing-Free Cu Chemical Mechanical Polishing Process Based on Endpoint Detection with Laser Beam
Y. Tokuyama, H. Ogawa, M. Yanagisawa, J. Kikuchi, H. Nakagawa, Y. Horiike(1.Department of Materials Science, School of Engineering, The University of Tokyo, 2.Speedfam Co., Ltd., 3.Axiomatec Inc., 4.Semiconductor Company, Matsushita Electric Industrial Co., Ltd)
