2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
[A-1-6]A Study on Reclaimed Photoresist Developer Using an Electrodialysis Method
Hiroshi Sugawara, Yoshinori Tajima, Tadahiro Ohmi(1.Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 2.Organo Corporation, 3.New Industry Creation Hatchery Center, Tohoku University)
