2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
[A-2-2]Spin-Drying with CO2 Gas Purge for 0.13 μm DRAM's Contact Process
Yoshihiro Ogawa, Hisashi Okuchi, Hiroshi Tomita, Kunihiro Miyazaki, Kazuhiko Takase, Soichi Nadahara(1.Process and Manufacturing Engineering center., Toshiba Corp. Semiconductor company)
