2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
[A-2-4]Impact of Gate Etch Damage and Profile in High Density DRAM Cell
Il-Gweon Kim, Jung-wan Bae, Jun-Ho Choy, Nam-Sung Kim, Young-Woo Kweon, Se-Kyoung Choi, Sung-Chul Kim, Joo-Seog Park, Ji-Byum Kim(1.TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.)
