2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
[A-2-5]Effect of Poly Metal Gate Etch Post-Cleaning on the Tail Distribution of DRAM Data Retention Time
Nam-Sung Kim, Il-Gweon Kim, Jun-Ho Choy, Se-Kyeong Choi, Jo-Bong Choi, Young-Woo Kweon, Sung-Cheul Kim, Ju-Seok Park, Ji-Bum Kim(1.Technology Group 4, Memory R&D Division, Hynix Semiconductor Co., Ltd.)
