2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
[A-2-8]Filling of Tungsten into Deep Trench Using Time-Modulation CVD Method
Y. Igarashi, T. Morooka, Y. Yamada, T. Nakamura, K. W. Lee, K. T. Park, H. Kurino, M. Koyanagi(1.Dept. of Machine Intelligence and Systems Engineering, Tohoku Univ., 2.JST(Japan Science and Technology Corporation))
