2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
[B-1-2]Three-Dimensional Integration of Fully Depleted SOI Devices
T. Morooka, T. Nakamura, Y. Yamada, Y. Igarashi, K. W. Lee, K. T. Park, H. Kurino, M. Koyanagi(1.Dept. of Machine Intelligence and Systems Engineering, Tohoku University, 2.JST(Japan Science and Technology Corporation))
