2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan

[B-1-6]Oxygen Plasma Activated Silicon Direct Bonding in PECVD Mode

T. H. Kim, M. M. R. Howlader, T. Itoh, T. Suga(1.Research Center for Advanced Science and Technology (RCAST), The University of Tokyo)
https://doi.org/10.7567/SSDM.2001.B-1-6
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