2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
Sep 26 - Sep 28, 2001Diamond Hotel, Tokyo, Japan
[B-2-2]Interconnect Length Distribution in Si System ULSI
Naohiro Takagi, Hiyouko Shinoki, Tomohito Tsushima, Yoshisato Yokoyama, Kazuya Masu(1.Precision and Intelligence Laboratory, Tokyo Institute of Technology)
