2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[A-1-3]Novel Strained-Si Substrate Technology for Transistor Performance Enhancement
Chun-Chieh Lin, Chao-Hsiung Wang, Chung-Hu Ge, Chien-Chao Huang, Tien-Chih Chang, Liang-Gi Yao, Shih-Chang Chen, Mong-Song Liang, Fu-Liang Yang, Yee-Chia Yeo, Chenming Hu(1.Taiwan Semiconductor Manufacturing Company, Ltd.)
