2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan

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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan

You can search for presentations in this event.

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Search Results(428)

[A-1-2]Enhanced performance from SiGe pMOSFETs Fabricated on Novel SiGe Virtual Substrates Grown on 10μm x 10μm Si Pillars

A. M. Waite, U. N. Straube, N. S. Lloyd, S. G. Croucher, Y. T. Tang, B. Rong, A. G. R. Evans, T. J. Grasby, M. Myronov, T. E. Whall, E. H. C. Parker, D. J. Norris, A. G. Cullis(1.University of Southampton, Dept. of Electronics and Computer Science, 2.University of Warwick, Dept of Physics, 3.University of Sheffield, Department of Electronic & Electrical Engineering)

[B-1-2]Effects of Oxynitride-Based Interface Control on HfO2 MIS Properties and FET Performance

H. Ota, N. Yasuda, T. Yasuda, Y. Morita, N. Miyata, K. Tominaga M. Kadoshima, S. Migita, T. Nabatame, A. Toriumi(1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), AIST, 2.MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), National Institute of Advanced Industrial Science and Technology (AIST), 3.Department of Materials Science, School of Engineering, University of Tokyo)

[B-1-4]Impact of Hf metal pre-deposition in CVD- and PVD-HfO2 dielectrics

Kazuhiko Yamamoto, Masayuki Asai, Shigenori Hayashi, Sadayoshi Horii, Masaaki Niwa, Hironobu Miya(1.ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd., 2.Semiconductor equipment system laboratory, Hitachi Kokusai Electric Inc.)

[B-2-2]Structure control of periodic porous silica film for low-k application

Kazuhiro Yamada, Yoshiaki Oku, Nobuhiro Hata, Shozo Takada, Takamaro Kikkawa(1.MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 2.MIRAI Project, Advanced Semiconductor Research center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 3.Research Center for Nanodevices and Systems, Hiroshima University)

[C-1-2]A Novel TEM/AFM/STM Microscopy for Cu Nano-Wire Electromigration

Satoru FUJISAWA, Takamaro KIKKAWA, Tokushi KIZUKA(1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 2.Research Center for Nanodevices and Systems, Hiroshima University, 3.Institute of Materials Science, University of Tsukuba)

[C-1-4]Characterization of Si Surface Stress in Various Dielectric Thin Film/Si Structure by Photoreflectance Spectroscopy

Masayuki Sohgawa, Hirofumi Kanda, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama(1.Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering Science, Osaka University, 2.Dept. Electrical Engineering, Wakayama National College of Technology)

[C-2-3]Water Absorption into ALD-Al2O3 Films as revealed by Physical Analysis and Electrical Characterization

Masaru Kadoshima, Masayasu Nishizawa, Tetsuji Yasuda, Toshihide Nabatame, Akira Toriumi(1.MIRAI Project, Association of Super-Advanced Electronics Technologies (ASET), 2.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 3.Department of Materials Science School of Engineering, University of Tokyo)

[C-2-4]Comparison Studies on Oxygen Diffusion Coefficients for ALD-Al2O3 and PLD-HfO2 Films using 18O Isotope

Toshihide Nabatame, Tetsuji Yasuda, Masayasu Nishizawa, Minoru Ikeda, Tsuyoshi Horikawa, Akira Toriumi(1.MIRAI Project, Association of Super-Advanced Electronics Technologies (ASET), 2.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 3.Department of Materials Science School of Engineering, University of Tokyo)

[D-2-1]High-Performance 1T1MTJ MRAM Technology with an Amorphous MTJ Material

M. Motoyoshi, K. Moriyama, H. Mori, C. Fukumoto, H. Itoh, H. Kano, K. Bessho, H. Narisawa(1.Technology Development Group, SNC, Sony Corporation, 2.LSI Design Division, Sony Semiconductor Kyushu, 3.MOS Production Division, Sony Semiconductor Kyushu, 4.Group No. 2, Storage Technology Laboratories, Sony Corporation)

[D-2-4]New multi layer top electrode of SRO/IrOx for 0.35μm FRAM

Yoshimasa Horii, Jeffrey S. Cross, Naoyuki Sato, Soichiro Ozawa, Katsuyoshi Matsuura, Mitsushi Fujiki, Takeyasu Saito, Satoru Mihara, Takashi Eshita, Shan Sun, Fun Chu, Glen Fox, Rick Baily, Tom Davenport, Tatsuya Yamazaki(1.Fujitsu Limited, FRAM Development Department, 2.Fujitsu Laboratories Ltd., Inorganic material laboratories, 3.Ramtron International Corporations)

[F-1-2]Electronic Transport Properties of C60, C90 and Gd@C82 Fullerene-Carbon Nanotube Peapods

Takashi Shimada, Toshiya Okazaki, Yutaka Ohno, Kazutomo Suenaga, Shinya Iwatsuki, Shigeru Kishimoto, Takashi Mizutani, Risa Taniguchi, Takashi Inoue, Toshiki Sugai, Hisanori Shinohara(1.Department of Chemistry, Nagoya University, 2.Department of Quantum Engineering, Nagoya University, 3.National Institute of Advanced Industrial Science and Technology)

[F-1-4]Bonding Process for Nano-Scale Wiring using Carbon Nano-Tube by Scanning Tunneling Microscope Tip

N. Aoki, J. Takayama, M. Kida, K. Horiuchi, S. Yamada, T. Ida, K. Ishibashi, Y. Ochiai(1.Department of Materials Technology & Center for Frontier Electronics and Photonics, Chiba University, 2.Corporate Research Center, Fuji-Xerox Co. Ltd., 3.School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), 4.Semiconductor Laboratory, RIKEN)

[F-1-5]Electron Field Emission with Carbon Nanotube on a Si Tip

Phan Ngoc Minh, Le T. T. Tuyen, Takahito Ono, H. Mimura, Masayoshi Esashi(1.Venture business laboratory, New Industry Creation Hatchery Center, Faculty of Engineering, Tohoku University, 2.Research Institute of Electrical Communication, Tohoku University, 3.Instituto of Materials Science, NCST)

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