2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[B-1-1]Critical Materials Issues for High-k Gate Dielectric Integration
Robert M. Wallace(1.University of North Texas, Department of Materials Science)
