2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[B-1-4]Impact of Hf metal pre-deposition in CVD- and PVD-HfO2 dielectrics
Kazuhiko Yamamoto, Masayuki Asai, Shigenori Hayashi, Sadayoshi Horii, Masaaki Niwa, Hironobu Miya(1.ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd., 2.Semiconductor equipment system laboratory, Hitachi Kokusai Electric Inc.)
