2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[B-2-2]Structure control of periodic porous silica film for low-k application
Kazuhiro Yamada, Yoshiaki Oku, Nobuhiro Hata, Shozo Takada, Takamaro Kikkawa(1.MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 2.MIRAI Project, Advanced Semiconductor Research center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 3.Research Center for Nanodevices and Systems, Hiroshima University)
